Power Device Manufacturing

Hydrogen is used as a carrier gas to transport metal organic source chemicals into the MOCVD reaction chamber. Power devices are either Gallium Nitride (GaN) or Silicon Carbide (SiC) devices. The performance of GaN devices vary depending on the quantity of oxygen contained in the device structure. Nitrogen is a dopant in SiC devices. Controlling O2 and H2O or N2 levels in the hydrogen carrier gas to sub part-per-billion (ppb) levels is a critical consideration in the manufacture of power devices.

Power+Energy micro-channel hydrogen purifiers remove all impurities from industrial grade hydrogen (>97%) to produce 99.9999999%(9N) hydrogen with an oxygen and moisture content of less than 0.1ppb per impurity. The output purity of a Power+Energy micro-channel h2 purifier does not vary with the purity of the feed gas providing the ultimate in process protection.

Power+Energy  micro-channel hydrogen purifiers are available in a wide range of capacities to match a manufacturer's Hydrogen flow requirements.  Click here to see Hydrogen Purifier Single and Multi-Tool Installation Configurations or use our Purifier Model Availability or Purifier Sizing Model.

Feel free to contact one of our Channel Partners to help you choose the right P+E product for your application. 

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