Semiconductor Processing Segment

Hydrogen features in a number of sensitive semiconductor processes where the control of impurities into the sub part-per-billion range has a critical impact on device function or yield.

Power+Energy micro-channel hydrogen purifiers remove all impurities from industrial grade hydrogen (>97%) to produce 99.9999999%(9N) hydrogen with an oxygen and moisture content of less than 0.1ppb per impurity. The output purity of a Power+Energy micro-channel h2 purifier does not vary with the purity of the feed gas providing the ultimate in process protection.

Power+Energy  micro-channel hydrogen purifiers are available in a wide range of capacities to match a manufacturer's Hydrogen flow requirements.  Click here to see Hydrogen Purifier Single and Multi-Tool Installation Configurations or use our Purifier Model Availability or Purifier Sizing Model.

Feel free to contact one of our Channel Partners to help you choose the right P+E product for your application. 

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Purifier Installations

Purifier Sizing Model

Product Applications