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Archive for the HEMS Category

Semiconductor Lithography Optics (Photolithography) in Hydrogen

Semiconductor Lithography Optics (Photolithography) in Hydrogen

Today’s semiconductor manufacturing uses Photolithography in the microfabrication process to pattern parts of a thin film or the bulk of a substrate.  It uses extreme ultra violet light to transfer complex geometric patterns from a photomask to a light-sensitive chemical “photoresist”

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Hydrogen Production Certification

Hydrogen Production Certification

Suppliers of high purity hydrogen generally provide a certificate of analysis (CoA) with each shipment. A CoA will typically call out several impurities, eg. O2, H2O, N2, CO, CO2, CH4 , etc . As most analytical instruments can only detect

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Polysilicon Manufacturing

Polysilicon Manufacturing using Pure Hydrogen

Hydrogen is used in the production of polysilicon manufactured in fluidized bed reactors (FBR) from silane (SiH4) gas. In order to meet the purity requirements of the solar industry, polysilicon manufacturers must use ultra-pure starting materials including Hydrogen. Power+Energy HEMS

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SAE J2719 Hydrogen Analyzer

Hydrogen Fuel for Vehicles

The Society of Automotive Engineers (SAE) has developed a specification for hydrogen intended for use in a PEM fuel cell in a motor vehicle, SAE J2719.  This same specification has been adopted internationally by the International Standards Organization (ISO).  Importantly

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Power Semiconductor Device Manufacturing

Power Semiconductor Devices

High-purity Hydrogen is used as a carrier gas to transport metal organic source chemicals into the MOCVD reaction chamber. Power devices are either Gallium Nitride (GaN) or Silicon Carbide (SiC) devices. The performance of GaN devices vary depending on the quantity

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Pure Hydrogen in TFT LCD Manufacturing

Pure Hydrogen in TFT LCD Manufacturing

Similar to other thin-film manufacturing processes, pure hydrogen is used in combination with silane and with dopant gases in the production of thin-film-transistor liquid crystal display (TFT LCD) panels. Consistent control of impurities is required to ensure the high yields

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Semiconductor Processing Hydrogen

Hydrogen Analysis for Semiconductor Processing

Hydrogen features in a number of sensitive semiconductor processes where the control of impurities into the sub part-per-billion (ppb) range has a critical impact on device function or yield.  Power+Energy suggest using HEMS™ instruments to verify hydrogen purity prior to

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Photovoltaic Manufacturing

Hydrogen Purity Analysis for PV thin film manfacturing

Hydrogen is used in combination with silane to produce amorphous and micro-crystaline silicon layers during the thin film silicon photovoltaic manufacturing process. The electrical output of the resulting solar cell, its efficiency and its lifetime are all affected by the

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High Brightness LED Manufacturing

HB LED Manufacturing requires 9N's pure hydrogen

Hydrogen is used as a carrier gas to transport metal organic source chemicals into the MOCVD reaction chamber. High Brightness LEDs are typically Gallium Nitride (GaN) devices. The performance of a GaN device can vary depending on the oxygen impurity

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