Hydrogen is used in combination with silane to produce amorphous and micro-crystaline silicon layers during the thin film silicon photovoltaic manufacturing process. The electrical output of the resulting solar cell, its efficiency and its lifetime are all affected by the concentration of nitrogen and oxygen atoms contained within the device structure. Control of these impurities is an important consideration for manufacturers. Nitrogen and Oxygen contamination can arise from chamber leaks, from the load lock or from the source gases. By controlling oxygen and nitrogen contamination in Hydrogen to sub part-per-billion levels, a manufacturer can eliminate one significant source of contamination and contamination variability.

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