Polysilicon Manufacturing

Polysilicon Manufacturing using Pure Hydrogen

Hydrogen is used in the production of polysilicon manufactured in fluidized bed reactors (FBR) from silane (SiH4) gas. In order to meet the purity requirements of the solar industry, polysilicon manufacturers must use ultra-pure starting materials including Hydrogen.

Power+Energy HEMS analyzers detect all impurities up to 100 Atomic Mass Units (AMU) with part-per-billion (ppb) levels of resolution. HEMS allows polysilicon manufacturing facilities to qualify their hydrogen gas and hydrogen gas supply systems before each process run thereby helping to ensure the best possible device yields. HEMS also enables detailed trouble-shooting of H2 supply systems and provides real time data to show when a system can be released for production.

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