Pure Hydrogen in TFT LCD Manufacturing

Pure Hydrogen in TFT LCD Manufacturing

Similar to other thin-film manufacturing processes, pure hydrogen is used in combination with silane and with dopant gases in the production of thin-film-transistor liquid crystal display (TFT LCD) panels. Consistent control of impurities is required to ensure the high yields needed for a profitable TFT LCD production operation.

Power+Energy HEMS analyzers detect all impurities up to 100 Atomic Mass Units (AMU) with part-per-billion (ppb) levels of resolution. HEMS allows manufacturers to qualify their hydrogen gas and hydrogen gas supply systems before each process run thereby helping to ensure the best possible device yields. HEMS also enables detailed trouble-shooting of H2 supply systems and provides real time data to show when a system can be released for production.

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